Development and Applications of MEMS Components
Alexey Aleksandrovich Levitskiy, Pavel Sergeyevich Marinushkin
Abstract
This article provides the results of the MEMS (MicroElectroMechanical Systems) components studies. The design considerations and manufacturing techniques of the silicon-based MEMS components are considered. Results of the experimental characterization of the fabricated prototypes are provided. Furthermore, discussion related to the future development of the MEMS components is also presented.