Development of technology of mylticomponent instrument composition formation on the basis of porous silicon.
Evgeniya Ivanovna Zubko, Evgenii Yakovlevich Shvets
Abstract
Technological scheme for a formation of electron instrument compositions PcCu /por-Si/n-Si and PcAl/por-Si/n-Si has been developed. The data on the technological adaptation of the deposition and annealing of samples have been given. The effect of annealing for morphological and electrical characteristicks of the obtained compositions has been investigated.